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Close-Packed Silicon Microelectrodes for Scalable Spatially Oversampled Neural Recording
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Published Date:
Jan 2016
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Publisher's site:
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Source:IEEE Trans Biomed Eng. 63(1):120-130.
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[PDF-1.99 MB]
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Alternative Title:IEEE Trans Biomed Eng
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Description:Objective Neural recording electrodes are important tools for understanding neural codes and brain dynamics. Neural electrodes that are close-packed, such as in tetrodes, enable spatial oversampling of neural activity, which facilitates data analysis. Here we present the design and implementation of close-packed silicon microelectrodes, to enable spatially oversampled recording of neural activity in a scalable fashion. Methods Our probes are fabricated in a hybrid lithography process, resulting in a dense array of recording sites connected to submicron dimension wiring. Results We demonstrate an implementation of a probe comprising 1000 electrode pads, each 9 × 9 μm, at a pitch of 11 μm. We introduce design automation and packaging methods that allow us to readily create a large variety of different designs. Significance Finally, we perform neural recordings with such probes in the live mammalian brain that illustrate the spatial oversampling potential of closely packed electrode sites.
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Subject:
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Pubmed ID:26699649
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Pubmed Central ID:PMC4692190
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