Avalanche Photoionization Detector
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2024/01/21
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Description:This paper reports a microfluidic gas sensor termed avalanche photoionization detector (APID). The APID employs miniaturized vacuum-UV (VUV) lamp as a photoionization source to ionize volatile organic compounds (VOCs) within a microfluidic ionization chamber made of a MgF 2 substrate bonded to an etch-through silicon microfluidic channel. The resultant electrons are collected by a reversely-biased avalanche P/N junction and subsequently undergo an avalanche process within the junction's depletion region, resulting in a substantial internal gain. [Description provided by NIOSH]
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ISBN:9798350357929
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ISSN:2160-1968
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NIOSHTIC Number:nn:20069617
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Citation:IEEE 34th International Conference on Micro Electro Mechanical Systems, January 21-25, 2024, Austin, Texas. New York: Institute of Electrical and Electronics Engineers (IEEE), 2024 Jan; :856-858
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Email:xsfan@umich.edu
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Federal Fiscal Year:2024
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Performing Organization:University of Michigan at Ann Arbor
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Peer Reviewed:False
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Start Date:20180901
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Source Full Name:IEEE 34th International Conference on Micro Electro Mechanical Systems, January 21-25, 2024, Austin, Texas
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End Date:20220831
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Main Document Checksum:urn:sha-512:2c864b767aa4b09ca2d55803551db1d996645cc6ee87f7d6ba2ed43a838ce3047d644ede880709906424337fccf50cbb8a4be8f5764973754317b4a9ce96d047
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