Monolithically Integrated µPID on µCOLUMNS for Ultracompact Micro-Gas Chromatography

Details

• Personal Author:
  Fan X ; Huang X ; Jeong S-Y ; Li W ; Nidetz R ; Sharma R ; Sivakumar AD ; Thota C ; Wu W ; Yang S ; Zhu H
• Description:
  This report describes a monolithically integrated microfluidic photoionization detector (µPID) on a microfabricated gas chromatography (µGC) column via wafer-level batch processing based on a silicon-on-insulator (SOI) architecture. The integrated chip enables an ultracompact (0.9 liters and 0.9 kg), fully automated, and battery-operated µGC system. Rapid separation of seven volatile organic compounds (VOCs) in approx. 2 min at room temperature is demonstrated. [Description provided by NIOSH]
• Subjects:
  Occupational Health Safety Volatile Organic Compounds
• Keywords:
  Analytical Instruments Author Keywords: Microfabricated Gas Chromatography Gas Chromatography Gas Detectors Microchemistry Monolithic Integration Photoionization Detector Sensors VOCs Volatile Organic Compounds
• ISBN:
  9798350357929
• ISSN:
  2160-1968
• Publisher:
  Institute of Electrical and Electronics Engineers (IEEE)
• Document Type:
  Text
• Funding:
  Grant
• Genre:
  Proceedings
• Place as Subject:
  Michigan ; OSHA Region 5
• CIO:
  National Institute for Occupational Safety and Health (NIOSH)
• Topic:
  Workplace Safety & Health
• Location:
  North America
• Pages in Document:
  229-231
• NIOSHTIC Number:
  nn:20069616
• Citation:
  IEEE 34th International Conference on Micro Electro Mechanical Systems, January 21-25, 2024, Austin, Texas. New York: Institute of Electrical and Electronics Engineers (IEEE), 2024 Jan; :229-231
• Email:
  xsfan@umich.edu
• Federal Fiscal Year:
  2024
• Performing Organization:
  University of Michigan at Ann Arbor
• Peer Reviewed:
  False
• Start Date:
  20180901
• Source Full Name:
  IEEE 34th International Conference on Micro Electro Mechanical Systems, January 21-25, 2024, Austin, Texas
• End Date:
  20220831
• Collection(s):
  National Institute for Occupational Safety and Health
• Main Document Checksum:
  urn:sha-512:18b7b9ab1359ab0ad8a1ecca523cc049465ca8987613991f1c891a8556495f6be10706f9be91d6c287b7894fcabad7f05be5cdfa8251d079958d61a08c669a53
• Download URL:
  https://stacks.cdc.gov/view/cdc/208011/cdc_208011_DS1.pdf
• File Type:
  [PDF - 1.89 MB ]