Glove permeation by semiconductor processing mixtures containing glycol-ether derivatives

Details

• Personal Author:
  Han M ; Ke H ; Patrash SJ ; Smigiel D ; Sulewski R ; Zellers ET ; Zhang GZ
• Description:
  A series of experiments was performed to determine the effectiveness of different types of gloves in preventing permeation of chemical mixtures and pure components used in the processing and formation of semiconductors. Tested materials included: butyl, nitrile, and natural rubber as well as natural rubber/neoprene blend and a natural rubber/neoprene/nitrile blend. Breakthrough times (BT) and permeation rates (PR) were determined using a permeation cell according to the method ASTM F739-85. The compounds used included 2- ethoxyethyl-acetate (111159) (2-EEA), n-butyl-acetate (105464), 2- methoxyethanol (109864) (2-ME), 2-methoxyethyl-acetate (110496) (2- MEA), xylene (1330207), and mixtures of these compounds as they occur in the various processes. Except in the case of xylene or a xylene/2-ME mixture, butyl gloves showed by far the largest BT and PR, and nitrile gloves were second best. The other types of gloves had low BTs and high PRs for every compound and mixture used. Due to large differences in glove properties when exposed to mixtures or individual compounds, the authors suggest empirical evaluation as the only means for determining the safe choice of protective materials. A comparison of materials at 37 and 25 degrees-C revealed that the values of BT were smaller and PR were larger at the higher temperature. The only exception to this was when pure 2- MEA was used with the butyl material; in fact, butyl gloves were least affected by the temperature change. [Description provided by NIOSH]
• Subjects:
  Manufacturing And Industrial Facilities Occupational Health Personal Protective Equipment Protective Clothing Safety Skin Solvents
• Keywords:
  Control-technology Electronics-industry Hand-protection Materials-testing NIOSH-Grant NIOSH-Publication Organic-solvents Protective-clothing Skin-protection
• ISSN:
  0002-8894
• Document Type:
  Text
• Funding:
  Grant
• Genre:
  Journal Article
• Place as Subject:
  Michigan ; OSHA Region 5
• CIO:
  National Institute for Occupational Safety and Health (NIOSH)
• Topic:
  Workplace Safety & Health
• Location:
  North America
• Pages in Document:
  105-116
• Volume:
  53
• Issue:
  2
• NIOSHTIC Number:
  nn:00207389
• Citation:
  Am Ind Hyg Assoc J 1992 Feb; 53(2):105-116
• Contact Point Address:
  Environmental & Indust Health University of Michigan 109 S Observatory Ann Arbor, MI 48109-2029
• CAS Registry Number:
  2-Methoxyethanol (CAS RN 109-86-4) ; Ethylene glycol monomethyl ether acetate (CAS RN 110-49-6) ; Glycol monoethyl ether acetate (CAS RN 111-15-9) ; sec-Butyl acetate (CAS RN 105-46-4) ; Xylene (CAS RN 1330-20-7)
• Federal Fiscal Year:
  1992
• NORA Priority Area:
  Research Tools and Approaches: Control Technology and Personal Protective Equipment
• Performing Organization:
  University of Michigan at Ann Arbor, Ann Arbor, Michigan
• Peer Reviewed:
  True
• Start Date:
  19890701
• Source Full Name:
  American Industrial Hygiene Association Journal
• End Date:
  19900630
• Collection(s):
  National Institute for Occupational Safety and Health
• Main Document Checksum:
  urn:sha-512:72afc557eacb682547b84366e6f9b0bda5d4cf09e75a487a1325ef235f70fd08abd5ad672e21e65b81e0196973fd40fc176ef28d95a0a931c7055a2c9bc9162f
• Download URL:
  https://stacks.cdc.gov/view/cdc/204815/cdc_204815_DS1.pdf
• File Type:
  [PDF - 1.08 MB ]