In-depth survey report: control technology for the microelectronics industry at NEC Electronics USA, Mountain View, California.

Details

• Personal Author:
  Jones JH ; Mitchell RI ; Ungers LJ
• Description:
  In order to made an accurate assessment of the hazard control technology as applied to the microelectronic industry, an in-depth survey was made of NEC Electronics USA (SIC-3674), Mountain View, California. Detailed studies were conducted of the four process operations of photolithography, operations using radio frequency radiation, and gas handling and distribution systems. This facility currently manufactures random logic products including read/only and random access memories. Descriptions were offered of the following processes: thermal oxidation, photolithography, plasma etching, wafer doping, chemical vapor deposition, metallization, and hydrogen alloying. Concentrations of chemicals were measured and monitoring was also conducted of physical agents such as radiofrequency radiation and gamma or x-radiation. Chemical mix operators wear chemical resistant aprons, acid or chemical resistant sleevelets and gloves, and chemical splash goggles and face shields. Airborne levels of contaminants at the photolithography area proved to be only a fraction of the recommended threshold limit values (TLVs) for several substances including hexamethyldisilizane, acetone (67641), n-butyl-acetate (123864), and xylene (1330207). Both direct and indirect emissions of radiofrequency radiations were detected at levels in excess of the TLVs for both the electric and magnetic field components of a 13.56 megahertz source. According to the authors, proper fitting and maintenance of equipment cabinets, the installation of metal screens across view ports and proper grounding of instruments should help to reduce these exposures.
• Subjects:
  Accidents, Occupational Acoustics Noise Noise, Occupational Occupational Health Safety
• Keywords:
  Control-technology Electrical-fields Electronics-industry Field-Study Industrial-hygiene Magnetic-fields NIOSH-Author NIOSH-Survey Organic-solvents Region-9 Semiconductors

  More +
• DOI:
  https://doi.org/10.26616/NIOSHECTB11524b
• Publisher:
  National Institute for Occupational Safety and Health
• Document Type:
  Text
• Genre:
  Field Studies ; Control Technology
• Place as Subject:
  California ; Ohio ; OSHA Region 5 ; OSHA Region 9
• CIO:
  National Institute for Occupational Safety and Health (NIOSH)
• Division:
  DPSE - Division of Physical Sciences and Engineering
• Topic:
  Workplace Safety & Health
• Location:
  North America
• Pages in Document:
  1-45
• NIOSHTIC Number:
  nn:00180874
• Citation:
  Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, ECTB 115-24b, 1984 Aug; :1-45
• CAS Registry Number:
  Acetone (CAS RN 67-64-1) ; Butyl acetate (CAS RN 123-86-4) ; Xylene (CAS RN 1330-20-7)
• Federal Fiscal Year:
  1984
• Peer Reviewed:
  False
• NAICS and SIC Codes:
  3674 - Semiconductors and related devices - (SIC)
• Collection(s):
  National Institute for Occupational Safety and Health
• Main Document Checksum:
  urn:sha-512:432701767f28ee83be3b2566401eecb0f084eaf786fbb48128c8ff9860b4c5ee305a7081b6d5a06b5230b924e4959b8be0f854df425f35dd63564a0d0779c9c2
• Download URL:
  https://stacks.cdc.gov/view/cdc/180078/cdc_180078_DS1.pdf
• File Type:
  [PDF - 983.99 KB ]