Assessment of arsenic exposures and controls in gallium arsenide production

Details

• Personal Author:
  Jones, James H. ; Sheehy, John W.
• Description:
  Control measures and arsenic (7440382) exposures were examined at three gallium-arsenide (1303000) production facilities. The first was a gallium-arsenide crystal growing facility which produced, sliced, and polished wafers for use in gallium-arsenide optoelectronics, microwave and integrated circuit manufacturing activity. The second facility produced gallium-arsenide wafers, field effect transistors, and monolithic microwave integrated circuits. The third facility produced optoelectronic devices, specifically light emitting diodes. The Liquid Encapsulation Czochralski (LEC) and Horizontal Bridgeman (HB) crystal growing, LEC cleaning operations, ingot grinding/wafer sawing, and epitaxy processes were specifically highlighted. In all the processes at one facility except epitaxy, the average arsenic exposures were at or above the OSHA action level of 5 micrograms/cubic meter. During cleaning of the LEC crystal pullers, the average potential arsenic exposure to the cleaning operators was 1200 times the OSHA permissible exposure level of 10 micrograms/cubic meter. At the other two facilities personal exposures were well controlled. [Description provided by NIOSH]
• Subjects:
  Arsenic Electrical Equipment And Supplies Inorganic Chemicals Occupational Exposure Occupational Health Safety Semiconductors
• Keywords:
  Arsenic-compounds Control-technology Electronic-components Electronic-devices NIOSH-Author Occupational-exposure
• ISSN:
  0002-8894
• Document Type:
  Text
• Genre:
  Journal Article
• Place as Subject:
  Ohio ; OSHA Region 5
• CIO:
  National Institute for Occupational Safety and Health (NIOSH)
• Division:
  DPSE - Division of Physical Sciences and Engineering
• Topic:
  Workplace Safety & Health
• Location:
  North America
• Pages in Document:
  61-69
• Volume:
  54
• Issue:
  2
• NIOSHTIC Number:
  nn:00212924
• Citation:
  Am Ind Hyg Assoc J 1993 Feb; 54(2):61-69
• CAS Registry Number:
  Arsenic (CAS RN 7440-38-2) ; Gallium arsenide (CAS RN 1303-00-0)
• Federal Fiscal Year:
  1993
• NORA Priority Area:
  Research Tools and Approaches: Control Technology and Personal Protective Equipment
• Peer Reviewed:
  True
• Source Full Name:
  American Industrial Hygiene Association Journal
• Collection(s):
  National Institute for Occupational Safety and Health
• Main Document Checksum:
  urn:sha-512:a713131991d0418f653801fea7f6fd8268df3a39ac62f6c26502e25ff6d708eb615e928920e0753fc3efc5ddd29b12c1741c61fb9aad275cc1333b14f3789b79
• Download URL:
  https://stacks.cdc.gov/view/cdc/204198/cdc_204198_DS1.pdf
• File Type:
  [PDF - 755.79 KB ]