U.S. flag An official website of the United States government.
Official websites use .gov

A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS

A lock ( ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.

i

A Survey of Toxic Gas Detection System Users in the Semiconductor Industry

Public Domain


Details

  • Personal Author:
    Sussell, Aaron L.
  • Description:
    A variety of toxic, corrosive, flammable, pyrophoric, and asphyxiant gases are used in semiconductor manufacturing. Continuous monitoring of such gases has increasingly become a requirement of local and state regulations which are typically based on the Uniform Building Code (Section 911 H-6 occupancy) and Article 80 of the Uniform Fire Code. In addition, the Occupational Safety and Health Act requires each employer to render the workplace free from "recognized hazards causing or likely to cause death or serious physical harm to his employees". Concern for potential employee and community exposure to these gases has made gas detection systems (GDSs) an integral part of safety and health programs in the semiconductor industry. Evaluation of these systems without the benefit of hindsight is difficult since few comparative studies of commercial GDSs have been published (a search of the American Chemical Society Chemical Abstracts - Annual Indexes for the past five years revealed only two papers on this topic)4,5 and most semiconductor companies do not conduct such studies in-house. The first part of this paper reviews several types of GDSs with respect to their principal of operation, sensitivity, selectivity, response time and cost. The GDS types discussed are those based on electrochemical sensors, semiconductor sensors, paper-tape detectors, flame-emission spectrometry (FES), Fourier-Transform Infrared Spectrometry (FTIR), and mass spectrometry (MS). The second part of the paper describes the results of a mail survey of Semiconductor Safety Association (SSA) members to assess GDS utilization and performance in the in- dustry. Respondents provided information on GDS makes/models used, user satisfaction, gases used and monitored, areas monitored, frequency of false alarms, alarm locations, frequency of calibration and maintenance, and other characteristics. [Description provided by NIOSH]
  • Subjects:
  • Keywords:
  • ISSN:
    1084-578X
  • Document Type:
    Text
  • Genre:
    Journal Article
  • Place as Subject:
  • CIO:
    National Institute for Occupational Safety and Health (NIOSH)
  • Division:
    DSHEFS - Division of Surveillance, Hazard Evaluations, and Field Studies
  • Topic:
    Workplace Safety & Health
  • Location:
    North America
  • Pages in Document:
    56-65
  • NIOSHTIC Number:
    nn:20025224
  • Citation:
    SSA J 1989 Sep; :56-65
  • Federal Fiscal Year:
    1989
  • Peer Reviewed:
    True
  • Source Full Name:
    SSA Journal
  • Collection(s):
  • Main Document Checksum:
    urn:sha-512:96590ef593fdc02f3614dfce1cd2ff1e512109185b53008551335f72b4cf7e1ffd0c0ff62f9f528c3d7c510e14f3323f550996226ec1c413da8b2179f9da060e
  • Download URL:
  • File Type:
    Filetype[PDF - 3.46 MB ]
PREVIOUS
ON THIS PAGE
Details
CDC STACKS serves as an archival repository of CDC-published products including scientific findings, journal articles, guidelines, recommendations, or other public health information authored or co-authored by CDC or funded partners.

As a repository, CDC STACKS retains documents in their original published format to ensure public access to scientific information.
BACK TO TOP