Preliminary control technology survey of Motorola, Inc., Phoenix, Arizona.

Details

• Personal Author:
  Rose S ; Smith RK ; Ungers LG
• Description:
  As part of a control technology assessment of the electronic components industry, a preliminary survey was conducted at Motorola, Inc., Phoenix, Arizona. This facility manufactured silicon crystals and produced silicon wafers. The specific operations visited during this survey included silicon crystal growing and wafer production. The facility had a ventilation system which circulates room air at ten air exchanges per hour. Seventy five percent of the air was recycled. Process vent gases from epitaxial reactors were scrubbed by water spray scrubbers inside the equipment. Epitaxial cabinet vents were vented directly to the atmosphere. Worker protection was further enhanced by shielding from x-ray exposure and electrical interlocks on slicing equipment. Atmospheric monitoring was carried out for hydrogen (1333740) gas, by a Gastech monitor. No on line monitoring was done for arsine (7784421) or phosphine (7803512); intermittent sampling is performed using both personal and area samplers. New employees were required to attend safety programs and take courses. Safety requirements were included as an integral part of the training program. Workers were supplied with a variety of personal protective equipment including goggles, gowns, gloves, and boots. A face shield was also available. Respirators were not worn during normal operations. The authors conclude that the epitaxial area should be studied further, particularly the lack of engineering controls in the silicon-tetrachloride supply to the epitaxial process.
• Subjects:
  Accidents, Occupational Environmental Monitoring Occupational Health Preceptorship Safety Solvents Surveys And Questionnaires
• Keywords:
  Electronics-industry Field-Study IA-AR-75-FO-142-0 Industrial-hygiene NIOSH-Survey Personal-protective-equipment Region-9 Semiconductors Silicon-compounds Toxic-gases
• DOI:
  https://doi.org/10.26616/NIOSHECTB11514a
• Publisher:
  National Institute for Occupational Safety and Health
• Document Type:
  Text
• Genre:
  Field Studies ; Control Technology
• Place as Subject:
  Arizona ; Ohio ; OSHA Region 5 ; OSHA Region 9
• CIO:
  National Institute for Occupational Safety and Health (NIOSH)
• Division:
  DPSE - Division of Physical Sciences and Engineering
• Topic:
  Workplace Safety & Health
• Location:
  North America
• Pages in Document:
  1-20
• NIOSHTIC Number:
  nn:00180868
• Citation:
  Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, ECTB 115-14a, 1983 Mar; :1-20
• CAS Registry Number:
  Hydrogen (CAS RN 1333-74-0) ; Arsine (CAS RN 7784-42-1) ; Phosphine (PH3) (CAS RN 7803-51-2)
• Federal Fiscal Year:
  1983
• Peer Reviewed:
  False
• Collection(s):
  National Institute for Occupational Safety and Health
• Main Document Checksum:
  urn:sha-512:d379b4e63a05667ae8f4098fc1893e62ba27dd0bdfd4f89a1c88eb8876f51543a5e8f05d7d855bfb8db95b35a51f8bab8160e643c91bd6137e1e25c6b9e98d46
• Download URL:
  https://stacks.cdc.gov/view/cdc/180072/cdc_180072_DS1.pdf
• File Type:
  [PDF - 11.48 MB ]