Occupational exposure to airborne nanomaterials: an assessment of worker exposure to aerosolized metal oxide nanoparticles in semiconductor wastewater treatment

Details

• Personal Author:
  Brenner SA ; Caglayan C ; Neu-Baker NM ; Zurbenko IG
• Description:
  This study characterized potential inhalation exposures of workers to nanometal oxides associated with industrial wastewater treatment processes in a semiconductor research and development facility. Exposure assessment methodology was designed to capture aerosolized engineered nanomaterials associated with the chemical mechanical planarization wafer polishing process that were accessible for worker contact via inhalation in the on-site wastewater treatment facility. The research team conducted air sampling using a combination of filter-based capture methods for particle identification and characterization and real-time direct-reading instruments for semi-quantitation of particle number concentration. Filter-based samples were analyzed using electron microscopy and energy-dispersive x-ray spectroscopy while real-time particle counting data underwent statistical analysis. Sampling conducted over 14 months included 5 discrete sampling series events for 7 job tasks in coordination with on-site employees. The number of filter-based samples captured for analysis by electron microscopy was: 5 from personal breathing zone, 4 from task areas, and 3 from the background. Direct-reading instruments collected data for 5 sample collection periods in the task area and the background, and 2 extended background collection periods. Engineered nanomaterials of interest (Si, Al, Ce) were identified by electron microscopy in filter-based samples from all areas of collection, existing as agglomerates (>500 nm) and nanoparticles (100 nm-500 nm). Particle counts showed an increase in number concentration during and after selected tasks above background. While additional data is needed to support further statistical analysis and determine trends, this initial investigation suggests that nanoparticles used or generated by chemical mechanical planarization become aerosolized and may be accessible for inhalation exposures by workers in wastewater treatment facilities. Additional research is needed to further quantify the level of exposure and determine the potential human health impacts. [Description provided by NIOSH]
• Subjects:
  Aerosols Environmental Monitoring Metals Occupational Health Particulate Matter Risk Assessment Risk Factors Safety Semiconductors Waste Management Water Purification Workplace

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• Keywords:
  Aerosol-particles Air-sampling Author Keywords: Chemical Mechanical Planarization Engineered Nanomaterials Exposure-limits Filters Metal-oxides Nanometal Oxides Nanotechnology Occupational Exposure Assessment Particulates Risk-factors Sampling Semiconductor Fabrication Semiconductor Manufacturing Waste-treatment Water-purification Work-environment Workers

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• ISSN:
  1545-9624
• Document Type:
  Text
• Funding:
  Grant
• Genre:
  Journal Article
• Place as Subject:
  New York ; OSHA Region 2
• CIO:
  National Institute for Occupational Safety and Health (NIOSH)
• Topic:
  Workplace Safety & Health
• Location:
  North America
• Pages in Document:
  469-481
• Volume:
  12
• Issue:
  7
• NIOSHTIC Number:
  nn:20046333
• Citation:
  J Occup Environ Hyg 2015 Jul; 12(7):469-481
• Contact Point Address:
  Sara A. Brenner, State University of New York (SUNY) Polytechnic Institute, College of Nanoscale Science, Nanobioscience Constellation, 257 Fuller Road, Albany, NY 12203
• Email:
  sbrenner@sunycnse.com
• CAS Registry Number:
  Alumina (CAS RN 1344-28-1) ; Ceria (CAS RN 1306-38-3) ; Silica (CAS RN 7631-86-9)
• Federal Fiscal Year:
  2015
• Performing Organization:
  State University of New York at Albany
• Peer Reviewed:
  True
• Start Date:
  20120901
• Source Full Name:
  Journal of Occupational and Environmental Hygiene
• End Date:
  20150828
• Collection(s):
  National Institute for Occupational Safety and Health
• Main Document Checksum:
  urn:sha-512:41943d937e551b4457216118dbb821da01e84ac7f513cbcc3cf9d2b72fa262b83fa79434067722bc873f9a52e04f58e7e89f8c3d38880df09d92c3a8958077a5
• Download URL:
  https://stacks.cdc.gov/view/cdc/201429/cdc_201429_DS1.pdf
• File Type:
  [PDF - 595.68 KB ]