Preliminary survey report: control technology for gallium arsenide processing at Raytheon Company, Northborough, Massachusetts.

Details

• Personal Author:
  Jones JH ; Lenihan KL
• Description:
  A walk through survey evaluated technology available for control of hazardous substances resulting from gallium-arsenide (1303000) (GA) use, especially GA dusts, in semiconductor production at the Raytheon Company, Northborough, Massachusetts. The OSHA standard was 10 micrograms per cubic meter for arsenic. Potential hazards identified included solvent, acid, and gas exposure in production of GA wafers and radio frequency exposure during metallization. In the event of droppage of arsenic-trichloride (7784341), ventilation would shut down, leaving exhaust operational. Leakage in silane (7803625) and hydrogen (1333740) carrying piping would be a fire and explosion hazard. Interlocks were planned for the radio frequency sputterer. Other engineering controls were directed at ventilation, exhaust, and laminar air flow in relevant operations. Safe work practices included aqua-regia (8007565) preparation while most staff were absent, and carrying arsenic-trichloride ampules in plastic containers. Routine air monitoring was not done by the company, but previous personal samples in the epitaxy area did not show detectable levels of arsenic (7440382) or arsine (7784421). A full time nurse was available on site, and safety glasses and polyvinyl- chloride gloves were used where relevant. Recommendations include a regular program of air and wipe sampling and protection of piping. The authors conclude that an in depth survey will probably not be necessary.
• Subjects:
  Accidents, Occupational Animals Environmental Pollution Epidemiology Occupational Health Safety Somatotypes
• Keywords:
  Acids Air-sampling Arsenic-compounds Explosive-gases Field-Study Gases NIOSH-Author NIOSH-Survey Occupational-exposure Radio-waves Region-1 Safety-monitoring Solvents Ventilation-equipment

  More +
• DOI:
  https://doi.org/10.26616/NIOSHECTB16312a
• Publisher:
  National Institute for Occupational Safety and Health
• Document Type:
  Text
• Genre:
  Field Studies ; Control Technology
• Place as Subject:
  Massachusetts ; Ohio ; OSHA Region 1 ; OSHA Region 5
• CIO:
  National Institute for Occupational Safety and Health (NIOSH)
• Division:
  DPSE - Division of Physical Sciences and Engineering
• Topic:
  Workplace Safety & Health
• Location:
  North America
• Pages in Document:
  1-7
• NIOSHTIC Number:
  nn:00167892
• Citation:
  Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, ECTB 163-12a, 1987 Mar; :1-7
• CAS Registry Number:
  Gallium arsenide (CAS RN 1303-00-0) ; Arsenic chloride (AsCl3) (CAS RN 7784-34-1) ; Silane (CAS RN 7803-62-5) ; Hydrogen (CAS RN 1333-74-0) ; Aqua regia (CAS RN 8007-56-5) ; Arsenic (CAS RN 7440-38-2) ; Arsine (CAS RN 7784-42-1)
• Federal Fiscal Year:
  1987
• Peer Reviewed:
  False
• Collection(s):
  National Institute for Occupational Safety and Health
• Main Document Checksum:
  urn:sha-512:7bc82b2abc6e90bc909e5af9390fac280a68b3661a4438ad0a7269d4dd8169475dcf5c8ecac1735e36fd9cab14409c5b620987ef74ea9debac9c8bdc27cfbe13
• Download URL:
  https://stacks.cdc.gov/view/cdc/179851/cdc_179851_DS1.pdf
• File Type:
  [PDF - 389.96 KB ]