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Miamisburg, Ohio
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1982/07/01
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Description:Radiofrequency radiation from etchers was measured at NCR Microelectronics-Miamisburg (SIC-3611), Miamisburg, Ohio, on September 2, 1981, with a follow-up survey on June 17, 1982. The evaluation was requested by management to determine potential exposure of an unspecified number of employees. Some radiation leakage was detected around door seals and through glass windows of plasma etchers. OSHA standard for electric field measurements is 4,000 volts squared per meter squared (V2/m2) and measured fields ranged from 5000 to 50,000V2/m2. No magnetic field was in excess of standards. Radiofrequency shielded windows were installed and a follow-up survey indicated that radiation was not detectable.
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Pages in Document:17 pdf pages
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NIOSHTIC Number:nn:00127345
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NTIS Accession Number:PB84-139633
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Citation:Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, HETA 81-435-1142, 1982 Jul;:1-15;
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Federal Fiscal Year:1982
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Peer Reviewed:False
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[PDF-3.69 MB]