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Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage

CITE Title : Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage Personal Author(s) : Kim, Yong-Sik;Dagalakis, Nicholas G.;Choi, Young-Man; Published Date : 2018 Source : Microelectron Eng. 187-188 URL : https://stacks.cdc.gov/view/cdc/96119 Kim, Yong-Sik et al. (2018). Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage. Kim, Yong-Sik and Dagalakis, Nicholas G. and Choi, Young-Man "Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage" (2018) Kim, Yong-Sik et al. "Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage" , 2018 Export RIS Citation Information.

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Kim, Yong-Sik ;

Dagalakis, Nicholas G.

2018 | Microelectron Eng. 187-188

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Fabry-Pérot interferometer sensors have been widely used in Micro-Electro-Mechanical-Systems (MEMS) due to high displacement accuracy and immunity to...

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